Laser-induced breakdown spectroscopy; Microscope optics; Mn; Quantitative analysis;SPECTROMETRY; SAMPLES; LIBS
Manganese in the low alloy steel was analyzed quantitatively using micro-laser-induced breakdown spectroscopy. The spatial resolution of 20 mu m and the single pulse limit of detection of 0. 10% were obtained. The calibration curve of Mn was established with basic calibration method, with determination coefficient (R-2) of 0. 97. The average relative error of Mn concentration prediction on 7 samples is 12. 91%, and the root-mean-square error of cross-validation (RMSECV) is 0. 11%. The R2 reaches 0. 99 when using internal calibration method, as well as the average relative error of Mn concentration prediction on 7 samples and RMSECV were decreased to 7. 25% and 0. 07%, respectively. These results show that MicroLIBS technique is an effective approach for material surfaces quantitative microanalysis.