Laser-induced breakdown spectroscopy thickness measurements of films thinner than ablation rate
Journal:
Spectrochimica Acta Part B: Atomic Spectroscopy
(2017)
Keywords
LIBS; Thin films; Thickness;
Abstract
A new laser-induced breakdown spectroscopy (LIES) technique is proposed to measure the thickness of films thinner than the ablation rate. The film thickness dependence of the signal intensity is used as a calibration curve. It is demonstrated that calibration curves are successfully made for thin W films and (Fe, Cr, Ni) mixed-material films produced in a magnetron sputtering device. (C) 2017 Elsevier B.V. All rights reserved.